Flow dynamics, Physical phenomena in deposition, Integration and structural constraints in film deposition processes, Precursor depletion effects in 3D structures, Thermodynamics

statistical data analysis , process monitoring methodologies, process development, Spc, FDC, 8D, plasma etching fundamentals, Root Cause Analysis, dry etch processes, silicon etch, Dmaic, process troubleshooting, APC, oxide etch, profile control, Doe, process control systems, process characterization

Chemistry, Thermodynamics, films and interface engineering, mass transport, chemical kinetics, Ftir, data analysis systems, EDX, sims, TEM, Sem, Xps